论文信息 - Micro-profiling of 4H-SiC by Dry Etching to Form a Schottky Barrier Diode - 字舞流文

Micro-profiling of 4H-SiC by Dry Etching to Form a Schottky Barrier Diode

Y. Zadiranov | P. Ivanov | A. Potapov | N. Il'inskaya | N. Lebedeva | T. P. Samsonova | O. Kon’kov | T. Samsonova