Miniature sensor suitable for electronic nose applications.

A major research effort has been devoted over the years for the development of chemical sensors for the detection of chemical and explosive vapors. However, the deployment of such chemical sensors will require the use of multiple sensors (probably tens of sensors) in a sensor package to achieve selective detection. In order to keep the overall detector unit small, miniature sensors with sufficient sensitivity of detection will be needed. We report sensitive detection of dimethyl methylphosphonate (DMMP), a stimulant for the nerve agents, using a miniature sensor unit based on piezoresistive microcantilevers. The sensor can detect parts-per-trillion concentrations of DMMP within 10 s exposure times. The small size of the sensor makes it ideally suited for electronic nose applications.

[1]  K. Persaud,et al.  Analysis of discrimination mechanisms in the mammalian olfactory system using a model nose , 1982, Nature.

[2]  B. Liedberg,et al.  On the Adsorption of Dimethyl Methylphosphonate on Self-Assembled Alkanethiolate Monolayers: Influence of Humidity , 1999 .

[3]  J W Gardner and P N Bartlett,et al.  Electronic Noses: Principles and Applications , 1999 .

[4]  Shannon E. Stitzel,et al.  Cross-reactive chemical sensor arrays. , 2000, Chemical reviews.

[5]  J. Romano,et al.  Chemical Warfare Agents : Toxicity at Low Levels , 2000 .

[6]  R. A. McGill,et al.  Nerve agent detection using networks of single-walled carbon nanotubes , 2003 .

[7]  C. Dejous,et al.  Detection of GB and DMMP vapors by Love wave acoustic sensors using strong acidic fluoride polymers , 2004, IEEE Sensors Journal.

[8]  R. A. McGill,et al.  A sensitive, handheld vapor sensor based on microcantilevers , 2004 .

[9]  L.A. Pinnaduwage,et al.  Moore's law in homeland defense: an integrated sensor platform based on silicon microcantilevers , 2005, IEEE Sensors Journal.

[10]  G. Fedder,et al.  Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons , 2005, IEEE Sensors Journal.

[11]  Choongho Yu,et al.  Integration of metal oxide nanobelts with microsystems for nerve agent detection , 2005 .

[12]  Gregory P. Harmer,et al.  Detection of chemical warfare agents using nanostructured metal oxide sensors , 2005 .

[13]  Anja Boisen,et al.  SU-8 cantilever sensor system with integrated readout , 2005 .

[14]  Qing Zhu,et al.  Array adsorbent-coated lead zirconate titanate (PZT)/stainless steel cantilevers for dimethyl methylphosphonate (DMMP) detection , 2006 .

[15]  Mikhail Kozlov,et al.  Flexible carbon nanotube sensors for nerve agent simulants , 2006, Nanotechnology.