Peculiarities of using nanomaterials based on SiO2-SnO2-In2O3 as sensitive elements of vacuum sensors

Experimental data on the use of nanomaterials based on SiO2-SnO2-In2O3 as sensitive elements of vacuum sensors are presented. It is shown that the sensory response of a three-component system under consideration is determined by the mass fraction of indium oxide. It was determined that depending on the content of In2O3 the nanomaterials under study can be characterized by a decrease and an increase in resistance when the pressure is reduced lower than atmospheric one. The mechanisms that potentially correspond to the observed phenomenon are considered.