Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
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I. V. Trofimov | A. Sirotina | M. Tarkhov | E. Pershina | E. Zenova | M. Shibalov | A. Mumlyakov | E. Timofeeva | A. M. Tagachenkov | Y. Anufriev | N. V. Porokhov | N. Porokhov