Si wires growth by using of magnetron sputtering method

New method of Si wires synthesis by magnetron sputtering of solid target as a Si source is described. This method is simple, safe and cheaper in comparison with Chemical Vapor Deposition (CVD). Influence of silicon atom flow rates (target sputtering rate) and substrate temperature on the growth of different Si structures were studied. It was found that Si wires have different morphology, which depends on the Si flux and substrate temperature.