论文信息 - In situ HCl etching of Si for the elaboration of locally misorientated surfaces - 字舞流文

In situ HCl etching of Si for the elaboration of locally misorientated surfaces

J. Hartmann | Y. Morand | D. Rouchon | M. Mermoux | J. Barbé | V. Destefanis | J. Barbe