Nonlocal collisionless power absorption using effective viscosity model in inductively coupled plasma discharges

Effective viscosity model for inductively coupled plasma (ICP) discharges has been used to calculate the power absorbed inside ICP discharges. It is found that it can be used to calculate collisionless heating, which is a warm plasma effect. The validity of effective viscosity model has been checked by comparing it with kinetic model for warm ICP discharges. For very small plasma lengths, the results of both models are the same. At intermediate lengths where bounce resonance heating is important, results of the two models are not the same. Bounce resonance length given by effective viscosity model does not match very well with that given by the kinetic model. It shows that bounce resonance heating cannot be taken care of accurately using the effective viscosity model. For large plasma length, when driving frequencies are low, power absorbed calculated using the kinetic model is more than that calculated by the effective viscosity model. For high driving frequencies, power absorbed calculated using the kin...

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