World class manufacturing CIM or sink

The authors consider the computer integrated manufacturing (CIM) system developed and implemented in IBM's semiconductor manufacturing line in its Essex Junction, Vermont, facility. The CIM system architecture and the features designed into the system to support the 16-Mb DRAM technology program are described. Major hardware, software, architecture, and integration components are discussed, including equipment control, automation, automatic processing, logistics management, supervision and control capabilities, database integration, networks, and interfaces.<<ETX>>

[1]  D.J. Miller,et al.  The application of advanced manufacturing technology in semiconductor fabrication , 1988, Fifth IEEE/CHMT International Electronic Manufacturing Technology Symposium, 1988, 'Design-to-Manufacturing Transfer Cycle.

[2]  D. J. Miller,et al.  Technology development: focus on manufacturability , 1990 .

[3]  D. J. Miller.  Implementing the results of a manufacturing simulation in a semiconductor line , 1989, WSC '89.

[4]  B.P.F. Wu.  The focus of computer integrated manufacturing in the Japanese semiconductor industry , 1991, 1991 Proceedings IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

[5]  D. Horak,et al.  A high performance 16-Mb DRAM technology , 1990, Digest of Technical Papers.1990 Symposium on VLSI Technology.

[6]  Yasuo Mizokami.  The total CIM system for semiconductor plants , 1990, IEEE/SEMI International Symposium on Semiconductor Manufacturing Science.

[7]  David V. Horak,et al.  Cluster Processing For 16-Mb DRAM Production , 1990, Other Conferences.