Hybrid III-V/Si DFB laser integration on a 220 mm fully CMOS-compatible silionn photonlcsplotform

In this paper we demonstrate the first integration of a hybrid III-V/Si laser in a fully CMOS compatible 200mm technology. Device with SMSR up to 50 dB and a maximum output power of 4mW coupled in the waveguide have been measured. The fabrication flow is fully planar and compatible with large scale integration silicon photonics circuit.