Replication qualities and optical properties of UV-moulded microlens arrays

UV-moulded microlens arrays with high replication quality were fabricated using a parametric design method. It is important to maximize replication quality because one can obtain replicated micro-optical components with desired properties by accurate control of the shape. In this study, nickel mould inserts for microlens arrays with lenses having diameters between 3 and 230??m were fabricated by an electroforming process. The reflow method was used to make the master for the metallic mould insert. A UV-moulding system was designed and constructed, and the effects of compression pressure and UV-curing dose on the replication quality of UV-moulded microlens arrays with a diameter of 14??m were examined experimentally. Finally, geometrical and optical properties of the replicated microlens arrays were measured and analysed.

[1]  Klaus Zimmer,et al.  Replication of 3D-micro- and nanostructures using different UV-curable polymers , 2000 .

[2]  Young-Se Kwon,et al.  Microlens for efficient coupling between LED and optical fiber , 1999 .

[3]  Peter Dannberg,et al.  Polymer UV-molding for micro-optical systems and O/E-integration , 2000, SPIE MOEMS-MEMS.

[4]  Peter Dannberg,et al.  Double-sided hybrid micro-optical elements combining functions of multistage optical systems , 2001, SPIE Optics + Photonics.

[5]  Jong-Uk Bu,et al.  Fabrication of polymeric microlens of hemispherical shape using micromolding , 2002 .

[6]  Alec B. Scranton,et al.  Photopolymerizable liquid encapsulants for microelectronic devices , 2001 .

[7]  Hans Peter Herzig,et al.  Simple technique for replication of micro-optical elements , 1998 .

[8]  G. Park,et al.  Temperature dependence of lasing characteristics for long-wavelength (1.3-μm) GaAs-based quantum-dot lasers , 1999, IEEE Photonics Technology Letters.

[9]  John A. Rogers,et al.  Low-cost, low-loss microlens arrays fabricated by soft-lithography replication process , 2003 .

[10]  Peter Dannberg,et al.  Wafer scale integration of micro-optic and optoelectronic elements by polymer UV reaction molding , 1999, Photonics West.

[11]  M. T. Gale.  Replication techniques for diffractive optical elements , 1997 .

[12]  Shinill Kang,et al.  Fabrication of a microlens array using micro-compression molding with an electroformed mold insert , 2003 .

[13]  F. Bigl,et al.  Excimer laser micromachining and replication of 3D optical surfaces , 1998 .

[14]  Niculae Dumbravescu,et al.  Replication of diffractive gratings using embossing into UV-cured photopolymers , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[15]  Sylvia Daunert,et al.  Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Polymer-Based Microfabrication , 2001 .

[16]  K. Imanaka,et al.  Low-wavefront aberration and high-temperature stability molded micro Fresnel lens , 1989, IEEE Photonics Technology Letters.

[17]  Jan Haisma,et al.  Mold‐assisted nanolithography: A process for reliable pattern replication , 1996 .

[18]  G. Connell,et al.  Technique for monolithic fabrication of microlens arrays. , 1988, Applied optics.