Research on pitch analysis methods for calibration of one-dimensional grating standard based on nanometrological AFM

By present, the calibration of dimensions in nano scale is being paid more and more attentions. One-dimensional grating standard with pitches in nano-scale is being proposed by the CCL-WGDM 7 to be one of the five key comparison parameters in the emerging field of nanometrology. In the pitch calibration of grating standard, Gravity Center Method and Zero-Cross Points Method are proposed. The two methods are analyzed and simulated under different conditions. Based on the actual measurement data obtained by AFM, the two methods are used and the best value is determined. The results in the paper are useful to pitch calibration in nano scale.