Recent strong demand for production of ultra-precision components drives the need for 5-axis super-precision machines. A design study of such a 5-axis super-precision machine, which is capable of nanometer-level precision cutting, has been conducted by searching innovative solutions to the three major problems: friction, thermal deformation, and positioning accuracy. The final design implemented the following: stiff aerostatic guideways for near frictionless motion while structural rigidity was maintained, thermally stable structures made of alumina ceramics, and smooth control of linear motor based actuation system by employing high resolution and highly responsive linear encoders and linear power amplifiers. The designed machine has been built to verify the targeted performance. Various shapes that require nanometer- accuracy have been created using the machine. The results have consistently indicated stable nanometer-level accuracy. Targeted design performance has been successfully demonstrated.
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