A multi-sensor biological monitoring module built up in LTCC-technology

Low temperature co-fired ceramic (LTCC) technology was originally developed for the realization of multilayer circuits of high reliability. It was recognized that LTCC-technology is a valuable development in thick film technology which launches new application areas as it becomes evident that complex three-dimensional structures can be easily realized. Aspects of the realization of a sophisticated biological monitoring module comprising a three-dimensional network of channels and cavities is demonstrated.