论文信息 - Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 Å/s - 字舞流文

Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 Å/s

R. Crandall | Y. Xu | A. Gallagher | A. Mahan | B. Nelson | J. D. Cohen | Kimon C. Palinginis