论文信息 - CMOS MEMS - 字舞流文

CMOS MEMS

The co-integration of MEMS and CMOS technology is reviewed and the IC MEMS CAD tools SOLIDIS and ICMAT are outlined.

H. Baltes | A. Haberli

[2] Henry Baltes,et al. Linear array of CMOS double pass metal micromirrors , 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[3] H. Baltes,et al. Thermal CMOS Sensors―an Overview , 1996 .

[4] Oliver Paul,et al. Test structures to measure the Seebeck coefficient of CMOS IC polysilicon , 1997 .

[5] Piero Malcovati. CMOS thermoelectric sensor interfaces , 1996 .

[6] Henry Baltes,et al. Future of IC microtransducers , 1996 .

[7] Franco Maloberti,et al. Combined air humidity and flow CMOS microsensor with on-chip 15 bit sigma-delta A/D interface , 1995, Digest of Technical Papers., Symposium on VLSI Circuits..

[8] Oliver Paul,et al. Thermally actuated CMOS micromirrors , 1995 .

[9] L. Rubin,et al. Semiconductor Characterization: Present Status and Future Needs , 1996 .

[10] Wolfgang Kuehnel,et al. A surface micromachined silicon accelerometer with on-chip detection circuitry , 1994 .

[11] Franco Maloberti,et al. Progress in Microsensor Interfaces , 1996 .