论文信息 - Design, development and operational concept of an advanced MEMS IR source for miniaturized gas sensor systems

Design, development and operational concept of an advanced MEMS IR source for miniaturized gas sensor systems

Miniaturized non-dispersive infrared (NDIR) gas sensing systems require as key components bright thermal infrared (IR) sources that can be modulated at reasonably high speed to allow high-sensitivity lock-in detection to be applied. In addition such sources should provide a stable emission naffected by both short-term environmental changes as well as long-term drift. As miniaturized light bulbs, widely used in commercial NDIR gas sensing systems, cannot fulfil these requirements we have developed miniaturized thermal IR emitters with built-in monitoring and self-test features

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