Feedback Control of a Nonlinear Electrostatic Force Transducer
暂无分享,去创建一个
Richard Balogh | Paul A. Williams | Michelle Stephens | Stefan Chamraz | John Lehman | Ivan Ryger | Alexandra Artusio-Glimpse
[1] Sebastian Strache,et al. MATLAB/simulink model of a MEMS accelerometer read-out circuit , 2010 .
[2] Willy Sansen,et al. A capacitive pressure sensor with low impedance output and active suppression of parasitic effects , 1990 .
[3] Qinling Zheng,et al. On bandwidth-constrained disturbance rejection control , 2015 .
[4] J. R. Leigh. Essentials of nonlinear control theory , 1982 .
[5] A. L. Hugill,et al. Limitations to the application of electrostatic feedback in gravity meters , 1986 .
[6] Michael Kraft,et al. Multi stage noise shaping sigma–delta modulator (MASH) for capacitive MEMS accelerometers , 2012 .
[7] Zhiqiang Gao,et al. Active disturbance rejection control for MEMS gyroscopes , 2008, 2008 American Control Conference.
[8] Shen Zhao. Practical Solutions to the Non-minimum Phase and Vibration Problems under the Disturbance Rejection Paradigm , 2012 .
[9] P. Touboul,et al. Capacitive detection scheme for space accelerometers applications , 1999 .
[10] T.L. Grigorie. The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer. Part 2: Closed loop , 2008, 2008 International Conference on Perspective Technologies and Methods in MEMS Design.
[11] Matthias Durr,et al. Analysis And Design Principles Of Mems Devices , 2016 .
[12] Naresh K. Sinha,et al. Modern Control Systems , 1981, IEEE Transactions on Systems, Man, and Cybernetics.
[13] P. Pepe,et al. A Lyapunov-Krasovskii methodology for ISS and iISS of time-delay systems , 2006, Syst. Control. Lett..
[14] Zhiqiang Gao,et al. An active disturbance rejection based approach to vibration suppression in two-inertia systems , 2010, Proceedings of the 2010 American Control Conference.
[15] Michelle Stephens,et al. Micromachined Force Scale for Optical Power Measurement by Radiation Pressure Sensing , 2018, IEEE Sensors Journal.
[16] Zhiqiang Gao,et al. Frequency Response Analysis of Active Disturbance Rejection Based Control System , 2007, 2007 IEEE International Conference on Control Applications.
[17] M. Lucente,et al. Zero-g positioning for the BepiColombo ISA accelerometer , 2016 .
[18] Leonid Mirkin,et al. Control Issues in Systems with Loop Delays , 2005, Handbook of Networked and Embedded Control Systems.
[19] Fook Siong Chau,et al. A study of electrostatic spring softening for dual-axis micromirror , 2006 .
[20] Zhiqiang Gao,et al. Scaling and bandwidth-parameterization based controller tuning , 2003, Proceedings of the 2003 American Control Conference, 2003..
[21] J. C. Harrison,et al. Implementation of electrostatic feedback with a LaCoste‐Romberg Model G Gravity Meter , 1984 .