Fully Integrated CMOS-PMUT Transceiver

In this paper we present a full-transceiver (transmitter and receiver) intended to excite and amplify the signal coming from an ultrasonic transducer. The transducer is basically a piezoelectric micromachined ultrasound transducer (PMUT) which will be integrated monolithically over a $0.13\ \mathbf{\mu} \mathbf{m}$ high voltage CMOS process. The CMOS circuitry consists of two stages: a high voltage Transmitter, able to actuate the PMUT with a pulsed voltage from 0–32 V at 86 MHz maximum frequency, and a front-end Amplifier, able to amplify very low signals coming from the PMUT with minimum noise.

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