论文信息 - Study of the effect of the deposition parameters on the structural, electric and optical characteristics of polymorphous silicon films prepared by low frequency PECVD - 字舞流文

Study of the effect of the deposition parameters on the structural, electric and optical characteristics of polymorphous silicon films prepared by low frequency PECVD

M. Moreno | R. Ambrosio | A. Torres | P. Rosales | A. Itzmoyotl | C. Zuniga | A. Torres-Rios | K. Monfil