높은 회전성능(100°)을 가지는 초정밀 위치결정용 마이크로 병렬기구 플랫폼의 개발

This paper presents a micro-positioning platform based on the unique parallel mechanism recently developed by the authors. The platform has a meso-scale rectangular shape whose size is 20 × 23 ㎜. The stroke is 5 ㎜ for both the x- and yaxis and 100 degrees for the α-axis(the rotational axis along the x-axis). The platform is actuated by the three sets of twostage linear actuators: a linear motor for rough positioning and a piezo actuator for fine positioning. The platform is already assembled. Experimental results of the positioning measurements and control performance are presented.