초소형 3자유도 평면 스테이지 설계

In this paper, we report a novel surface motor stage supported air bearings and driven by electromagnetic linear motors to be used in a compact sized precision machine systems, such as micro-machine tools or measurement system with minimum height of the X-Y stage. By combining actuations of motors simultaneously, X and Y linear motions can be generated, and angular motion is also possible to control. To control planar motion, a grid encoder is used, and a programmable numerical controller is used to control this system. The thrust force and attraction force were calculated with magnetic circuit model. The designed prototype is 220 (L) × 220 (W) × 66 (H) ㎣ in total size with movement range with 20 ㎜ × 20 ㎜. The prototype was fabricated, and basic aspects such as vertical stiffness and thrust force were evaluated. For the positioning control, 20 ㎚ of positioning resolution was obtained for X and Y axis, and three motions could be controlled separately.