The Role of the Auger Mechanism in the Radiation Damage of Insulators

The ionization damage associated with electron and X-ray irradiation of insulating specimens during their investigation by various techniques (EM, AES, XPS, etc) is considered from the point of view of the Auger mechanism. This damage results from the Auger electron transport through the specimen and more specifically from the Auger cascade in the excited atom. After electronic rearrangements, this cascade finally leaves electron vacancies in the uppermost allowed states of the valence band. It is shown that these vacancies may explain various experimental results such as the stimulated desorption of ionic species in halides and oxides as well as the atomic displacements in covalent crystals. A possible way to quantify these effects is shown for the case of X-ray irradiation and for the case of electron irradiation. In the two cases, the correlation between the microscopic mechanisms and their macroscopic consequences, from the point of view of charging effects, is pointed out for the first time. Finally various positive aspects of these effects are outlined. They concern some new methods of characterization and of elaboration in materials science.

[1]  D. Ugarte Curling and closure of graphitic networks under electron-beam irradiation , 1992, Nature.

[2]  E. Shigemasa,et al.  Auger-electron—photoion and photoion—photoion coincidence studies on ionic fragmentation of SF6 following the S L-shell excitation , 1992 .

[3]  Cedric J. Powell,et al.  Cross sections for ionization of inner-shell electrons by electrons , 1976 .

[4]  P. W. Palmberg,et al.  Surface dissociation of potassium chloride by low-energy electron bombardment , 1967 .

[5]  C. E. Brion,et al.  Inner shell excitation of SF6 by 2.5 keV electron impact , 1978 .

[6]  R. Baragiola Ionization of Solids by Heavy Particles , 1993 .

[7]  Ken'ichiro Tanaka,et al.  Inner‐shell excitation and site specific fragmentation of poly(methylmethacrylate) thin film , 1994 .

[8]  K. Hieda,et al.  Effects of K-shell X-ray absorption of intracellular phosphorus on yeast cells. , 1991, International journal of radiation biology.

[9]  C. Reynaud,et al.  K-shell spectroscopy of Ar clusters , 1993 .

[10]  C. Parks BEAM EXPOSURE DEPENDENCE AND MECHANISMS OF PHOTON-STIMULATED DESORPTION FROM ALKALI FLUORIDES - eScholarship , 1984 .

[11]  B. Gnade,et al.  Angle resolved X-ray photoemission study of CaF2/Si(111) interfaces , 1992 .

[12]  T. Tyliszczak,et al.  Photon-stimulated desorption of Na atoms from NaCl following core-level excitation , 1992 .

[13]  W. A. Dench,et al.  Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids , 1979 .

[14]  P. Varga,et al.  Desorption Induced by Electronic Transitions DIET IV , 1990 .

[15]  Q. Guo,et al.  Valence excitation and ESD of Cl+ ions from the Cl/Si (100) interface , 1995 .

[16]  C. Powell Calculations of electron inelastic mean free paths from experimental optical data , 1985 .

[17]  J. Fine,et al.  Electron stimulated desorption of neutral species from (100) KCl surfaces , 1992 .

[18]  J. H. Scofield,et al.  Hartree-Slater subshell photoionization cross-sections at 1254 and 1487 eV , 1976 .

[19]  J. Cazaux Detection limits in Auger electron spectroscopy , 1984 .

[20]  T. Madey,et al.  Electron beam damage in Auger electron spectroscopy , 1981 .

[21]  R. Gomer,et al.  Desorption from Metal Surfaces by Low‐Energy Electrons , 1964 .

[22]  F. Sato,et al.  Solid-Phase Epitaxy with X-Ray Irradiation to Grow Dislocation-Free Silicon Films at Low Temperatures , 1991 .

[23]  P. Ajayan,et al.  Shape transformations in single-layer carbon nanotubes , 1993 .

[24]  J. Jenkin,et al.  Is there a universal mean-free-path curve for electron inelastic scattering in solids? , 1981 .