论文信息 - Synthesis of ArF photoresist polymer composed of three methacrylate monomers via reversible addition-fragmentation chain transfer (RAFT) polymerization - 字舞流文

Synthesis of ArF photoresist polymer composed of three methacrylate monomers via reversible addition-fragmentation chain transfer (RAFT) polymerization

Y. H. Kim | Jae Hyun Kim | Jae Woo Lee | Jong‐Chan Lee | Dong‐Gyun Kim | Hae-Sung Sohn | Sang-Ho Cha | Jaehyun Kim | Myung-Sun Kim | Wonhwa Lee | H. Yun | B. Kim | Jeongsik Kim | Deogbae Kim | Jong‐Chan Lee | Youngho Kim | Jae-Woo Lee