论文信息 - Surface roughness of aluminum oxide thin films deposited by DC and RF reactive magnetron sputtering - 字舞流文

Surface roughness of aluminum oxide thin films deposited by DC and RF reactive magnetron sputtering

N. Nuntawong | V. Patthanasettakul | P. Jaroenapibal | P. Eiamchai | M. Horprathum | C. Chananonnawathorn | N. Triroj | T. Lertvanithphol | S. Limwichean | C. Hom-on