Optical absorption in silicon layers in the presence of charge inversion/accumulation or ion implantation

We determine the optical losses in gate-induced charge accumulation/inversion layers at a Si/SiO2 interface. Comparison between gate-induced charge layers and ion-implanted thin silicon films having an identical sheet resistance shows that optical losses can be significantly lower for gate-induced layers. For a given sheet resistance, holes produce higher optical loss than electrons. Measurements have been performed at λ = 1550 nm.

[1]  Yongbo Tang,et al.  Over 67 GHz bandwidth hybrid silicon electroabsorption modulator with asymmetric segmented electrode for 1.3 μm transmission. , 2012, Optics express.

[2]  Constantin Bulucea,et al.  Recalculation of Irvin's resistivity curves for diffused layers in silicon using updated bulk resistivity data , 1993 .

[3]  P Sullivan,et al.  Demonstration of a low V pi L modulator with GHz bandwidth based on electro-optic polymer-clad silicon slot waveguides. , 2010, Optics express.

[4]  Juthika Basak,et al.  Recent development in a high-speed silicon optical modulator based on reverse-biased pn diode in a silicon waveguide , 2008 .

[5]  R. Soref,et al.  Electrooptical effects in silicon , 1987 .

[6]  S. Li,et al.  The dopant density and temperature dependence of electron mobility and resistivity in n-type silicon , 1977 .

[7]  J. Plummer,et al.  Electron mobility in inversion and accumulation layers on thermally oxidized silicon surfaces , 1980 .

[8]  Massimo Vanzi,et al.  A physically based mobility model for numerical simulation of nonplanar devices , 1988, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[9]  Juthika Basak,et al.  40 Gbit/s silicon optical modulator for highspeed applications , 2007 .

[10]  S. Sze,et al.  Physics of Semiconductor Devices: Sze/Physics , 2006 .

[11]  Michael Hochberg,et al.  Design of transmission line driven slot waveguide Mach-Zehnder interferometers and application to analog optical links. , 2010, Optics express.

[12]  D.B.M. Klaassen,et al.  A unified mobility model for device simulation—I. Model equations and concentration dependence , 1992 .

[13]  Wolfgang Freude,et al.  High-speed low-voltage electro-optic modulator with a polymer-infiltrated silicon photonic crystal waveguide. , 2008, Optics express.

[14]  David Hillerkuss,et al.  Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators. , 2012, Optics express.

[15]  J. Irvin,et al.  Resistivity of bulk silicon and of diffused layers in silicon , 1962 .

[16]  W. Kuzmicz Ionization of impurities in silicon , 1986 .

[17]  D Hillerkuss,et al.  42.7 Gbit/s electro-optic modulator in silicon technology. , 2011, Optics express.

[18]  G. Agrawal,et al.  Nonlinear optical phenomena in silicon waveguides: modeling and applications. , 2007, Optics express.

[19]  P. Ostoja,et al.  Relationship between resistivity and phosphorus concentration in silicon , 1974 .