A Spinning Current Circuit for Hall Measurements Down to the Nanotesla Range

The spinning current modulation technique is shown not only to be able to suppress all the offset and low-frequency noise contributions from the Hall sensing element and its preamplifier, but it may also suppress the parasitic signals, such as pickup noise and thermal electromotive force contributed by the interconnects in a hybrid Hall plate/driving electronics system with remote Hall sensor head. The selection process of an adequate modulation sequence achieving this goal is detailed. The optimization of the elements involved in the analog circuitry, including the analog switches, differential amplifiers, filters, interconnects, and so on, for given measurement conditions is discussed. A printed circuit board aimed at optimizing the operating conditions for a broad spectrum of Hall sensor types and applications, using pluggable modules for adapting the gain and transfer function, is presented. The modulation sequence, modulation frequency, and fine-tuning of the delays involved in the spinning sequence are adjustable by software. With this circuit board and the optimized spinning sequence, we show that the parasitics originating from the interconnection in a hybrid Hall microsystem with remote sensor 1.5 m away can indeed be suppressed. We demonstrate an offset reduction by about four decades, from 630 $\mu \text{T}$ down to less than 100 nT for a system with +/−35-mT full scale. The residual noise has a white spectrum down to at least 60 mHz, close to the Johnson–Nyquist thermal noise. A detectivity of 30 nT down to the sub-Hz range is demonstrated.

[1]  B. Schaffer,et al.  A miniature digital current sensor with differential Hall probes using enhanced chopping techniques and mechanical stress compensation , 2012, 2012 IEEE Sensors.

[2]  J. Betko,et al.  Planar Hall effect in Hall sensors made from InP/InGaAs heterostructure , 2005 .

[3]  P.J.A. Munter A low-offset spinning-current hall plate , 1990 .

[4]  Reinoud F. Wolffenbuttel,et al.  IC fabrication-compatible processing for instrumentation and measurement applications , 2001, IEEE Trans. Instrum. Meas..

[5]  Miguel Ocio,et al.  Low-frequency noise in AlGaAs/InGaAs/GaAs Hall micromagnetometers , 2003, SPIE International Symposium on Fluctuations and Noise.

[6]  E. Cohen,et al.  Low field Hall effect magnetometry , 1982 .

[7]  Samuel Huber,et al.  CMOS Single-Chip Electronic Compass With Microcontroller , 2007, IEEE Journal of Solid-State Circuits.

[8]  H. Ohno,et al.  Hall magnetometry on a single iron nanoparticle , 2002 .

[9]  D. Cox,et al.  Optimization of 2DEG InAs/GaSb Hall Sensors for Single Particle Detection , 2008, IEEE Transactions on Magnetics.

[10]  Radivoje Popovic,et al.  Nonlinearity in hall devices and its compensation , 1988 .

[11]  Bingyan Chen,et al.  Flicker noise and magnetic resolution of graphene hall sensors at low frequency , 2013 .

[12]  P.-A. Besse,et al.  Micro-Hall devices: performance, technologies and applications , 2003 .

[13]  L. J. V. D. Pauw A METHOD OF MEASURING SPECIFIC RESISTIVITY AND HALL EFFECT OF DISCS OF ARBITRARY SHAPE , 1991 .

[14]  R. Perzynski,et al.  Experimental evidence for violation of the fluctuation-dissipation theorem in a superspin glass. , 2010, Physical review letters.

[15]  Andrea Baschirotto,et al.  A Fluxgate Magnetic Sensor: From PCB to Micro-Integrated Technology , 2007, IEEE Transactions on Instrumentation and Measurement.

[16]  Christian Schott,et al.  A CMOS Single-Chip Electronic Compass with Microcontroller , 2007, 2007 IEEE International Solid-State Circuits Conference. Digest of Technical Papers.

[17]  R. Yakimova,et al.  Magnetic Scanning Probe Calibration Using Graphene Hall Sensor , 2013, IEEE Transactions on Magnetics.

[18]  P. Munter Electronic circuitry for a smart spinning-current Hall plate with low offset , 1991 .

[19]  S. Bending,et al.  Second-generation quantum-well sensors for room-temperature scanning Hall probe microscopy , 2005 .

[20]  A. Bakker,et al.  A CMOS nested-chopper instrumentation amplifier with 100-nV offset , 2000, IEEE Journal of Solid-State Circuits.

[21]  M. Missous,et al.  Nano-tesla magnetic field magnetometry using an InGaAs–AlGaAs–GaAs 2DEG Hall sensor , 2003 .

[22]  Vivek Agarwal,et al.  Design and Development of a Low-Cost Digital Magnetic Field Meter With Wide Dynamic Range for EMC Precompliance Measurements and Other Applications , 2009, IEEE Transactions on Instrumentation and Measurement.

[23]  A. Udo Limits of offset cancellation by the principle of spinning current Hall probe , 2004, Proceedings of IEEE Sensors, 2004..

[25]  Sandra Bellekom CMOS versus bipolar Hall plates regarding offset correction , 1999 .

[26]  Oliver Paul,et al.  Reverse-magnetic-field reciprocity in conductive samples with extended contacts , 2008 .

[27]  Christophe Coillot,et al.  An ac/dc magnetometer for space missions: Improvement of a Hall sensor by the magnetic flux concentration of the magnetic core of a searchcoil , 2008 .

[28]  Philippe Poure,et al.  CMOS microsystem front-end for microtesla resolution magnetic field measurement , 2001, ICECS 2001. 8th IEEE International Conference on Electronics, Circuits and Systems (Cat. No.01EX483).

[29]  M. Konczykowski,et al.  Local Hall probe magnetometry: a new technique for investigation of magnetic flux penetration, exclusion and trapping in HTSC , 1991 .

[30]  W. Masselink,et al.  Strained Quantum Well InAs Micro-Hall Sensors: Dependence of Device Performance on Channel Thickness , 2008, IEEE Transactions on Electron Devices.

[31]  Zeno Stoessel,et al.  Flicker noise and offset suppression in symmetric hall plates , 1993 .

[32]  O. Callen,et al.  Low-cost 2DEG magnetic sensor with metrological performances for magnetic field and current sensing , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[33]  Enrico Schurig,et al.  Three-Axis Teslameter With Integrated Hall Probe , 2007, IEEE Transactions on Instrumentation and Measurement.

[34]  Vincent Mosser,et al.  A spinning current circuit for nanotesla range resolution in Hall measurements , 2016, 2016 IEEE Sensors Applications Symposium (SAS).

[35]  P. Canfield,et al.  Upper and lower critical magnetic fields of superconducting NdFeAsO1−xFx single crystals studied by Hall-probe magnetization and specific heat , 2008, 0812.3953.

[36]  Alexandre Kerlain,et al.  Dynamic low-frequency noise cancellation in quantum well Hall sensors (QWHS) , 2008 .

[37]  Henry Baltes,et al.  Offset reduction in Hall devices by continuous spinning current method , 1998 .

[38]  Jean-Baptiste Kammerer,et al.  First Vertical Hall Device in standard 0.35 μm CMOS technology , 2008 .

[39]  R. Spal A new dc method of measuring the magnetoconductivity tensor of anisotropic crystals , 1980 .

[40]  Yoon-Ha Jeong,et al.  Highly sensitive Al0.25Ga0.75As/In0.25Ga0.75As/GaAs quantum-well Hall devices with Si-delta-doped GaAs layer grown by LP-MOCVD , 1996 .

[41]  William J. Bruno,et al.  Reverse‐field reciprocity for conducting specimens in magnetic fields , 1987 .

[42]  P. Kejik,et al.  True 2D CMOS integrated Hall sensor , 2007, 2007 IEEE Sensors.

[43]  Ahmet Oral,et al.  High Sensitivity, Multi-Functional Micro-Hall Sensors Fabricated using InAlSb/InAsSb/InAlSb Heterostructures. , 2009 .

[44]  A. Bilotti,et al.  Monolithic magnetic Hall sensor using dynamic quadrature offset cancellation , 1997, IEEE J. Solid State Circuits.

[45]  R. S. Popovic,et al.  High resolution Hall magnetic sensors , 2014, 2014 29th International Conference on Microelectronics Proceedings - MIEL 2014.

[46]  L.K.J. Vandamme,et al.  What Do We Certainly Know About $\hbox{1}/f$ Noise in MOSTs? , 2008, IEEE Transactions on Electron Devices.

[47]  Radivoje Popovic,et al.  An Integrated Micro-Hall Probe for Scanning Magnetic Microscopy , 2006 .

[48]  Massood Z. Atashbar,et al.  Integration of Triaxial Hall-Effect Sensor Technology for Gear Position Sensing in Commercial Vehicle Transmissions , 2012, IEEE Transactions on Instrumentation and Measurement.

[49]  R. Popovic,et al.  The vertical hall-effect device , 1984, IEEE Electron Device Letters.

[50]  Radivoje Popovic,et al.  Highly sensitive Hall sensor in CMOS technology , 2000 .

[51]  J. Lenz A review of magnetic sensors , 1990, Proc. IEEE.

[52]  W. Kwok,et al.  Approaching the pT range with a 2DEG InGaAs/InP Hall sensor at 77 K , 2000 .

[53]  Mohamed Henini,et al.  Real‐time scanning Hall probe microscopy , 1996 .

[54]  A. Kerlain,et al.  Hybrid Hall microsystem for high dynamic range/large bandwidth magnetometry applications , 2008, 2008 IEEE Sensors.

[55]  Jeng-Chung Chen,et al.  Characteristics of a sensitive micro-Hall probe fabricated on chemical vapor deposited graphene over the temperature range from liquid-helium to room temperature , 2011 .

[56]  E. Simoen,et al.  Size dependence of microscopic Hall sensor detection limits. , 2009, The Review of scientific instruments.

[57]  Adarsh Sandhu,et al.  High Temperature Hall sensors using AlGaN/GaN HEMT Structures , 2012 .

[58]  Jean-Baptiste Kammerer,et al.  Hall-effect magnetic tracking device for Magnetic Resonance Imaging , 2013, 2013 IEEE SENSORS.

[59]  Radivoje Popovic,et al.  Integrated Hall-effect magnetic sensors , 2001 .

[60]  Ed Ramsden Hall-Effect Sensors , 2001 .

[61]  Vincent Mosser,et al.  High sensitivity hall sensors with low thermal drift using AlGaAs/InGaAs/GaAs heterostructures , 1994 .

[62]  V. Mosser,et al.  New methods for the characterization of surface states density and substrate/epilayer interface states in pseudomorphic AlGaAs/InGaAs/GaAs heterostructures , 1999 .

[63]  Franco Maloberti,et al.  An integrated microsystem for 3-D magnetic field measurements , 2000, IEEE Trans. Instrum. Meas..

[64]  Claude Fermon,et al.  Optimised GMR sensors for low and high frequencies applications , 2006 .

[65]  Pavel Ripka,et al.  Advances in Magnetic Field Sensors , 2010, IEEE Sensors Journal.