Fabrication of photonic crystals in tantalum pentoxide films
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H. Meyer | W. Morgenroth | R. Boucher | U. Huebner | T. Glaser | H. Roth | J. Kunert | S. Schroeter
[1] H. Meyer,et al. Etching of submicron holes in SiO2,Ta2O5, and Nb2O5 , 2004 .
[2] Thomas Waas,et al. PROXECCO—Proximity effect correction by convolution , 1993 .
[3] S. Decoutere,et al. Determination of the proximity parameters in electron beam lithography using doughnut-structures , 1986 .