Study of the Transverse Piezoelectric Coefficient of Pb(Zr,Ti)O3 Thin Films as a Function of Texture and Composition

The effective transverse piezoelectric coefficient was measured on 1 μm thick sol-gel processed Pb(Zr,Ti)O3 (PZT) thin films as a function of texture and composition. Optimal values were obtained with PZT films of {100} texture near the morphotropic phase boundary (53/47). The best value amounted to -12 C/m2

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