Ultralow-loss silicon ring resonators

We experimentally demonstrate silicon ring resonators with internal quality factors of Q<sub>0</sub>=2.2×10<sup>7</sup>, corresponding to record 2.7-dB/m losses. We show that the losses are bend-loss-limited, indicating that the loss limit for silicon has not been reached.

[1]  Goran Z. Mashanovich,et al.  Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS) , 2008, SPIE OPTO.

[2]  Jurgen Michel,et al.  High performance, waveguide integrated Ge photodetectors. , 2007, Optics express.

[3]  J. Bowers,et al.  Novel concept for ultracompact polarization splitter-rotator based on silicon nanowires. , 2011, Optics express.

[4]  Tymon Barwicz,et al.  Multistage high-order microring-resonator add-drop filters. , 2006, Optics letters.

[5]  H. Thacker,et al.  Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects. , 2012, Optics express.

[6]  A. Leinse,et al.  Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding. , 2011, Optics express.

[7]  V. Mizrahi,et al.  Less than 1 dB per meter propagation loss of silica waveguides measured using a ring resonator , 1994 .

[8]  Mario Paniccia,et al.  Characterization of efficient wavelength conversion by four-wave mixing in sub-micron silicon waveguides. , 2008, Optics express.

[9]  O. Painter,et al.  Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment. , 2005, Optics express.

[10]  R. Rosenfeld.  Nature , 2009, Otolaryngology--head and neck surgery : official journal of American Academy of Otolaryngology-Head and Neck Surgery.

[11]  Michal Lipson,et al.  Chip-based frequency combs with sub-100 GHz repetition rates. , 2012, Optics letters.

[12]  Henry I. Smith,et al.  Polarization-transparent microphotonic devices in the strong confinement limit , 2007 .

[13]  L C Kimerling,et al.  Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction. , 2001, Optics letters.

[14]  Michal Lipson,et al.  High confinement micron-scale silicon nitride high Q ring resonator. , 2009, Optics express.

[15]  O. Painter,et al.  Ultra-low-loss optical delay line on a silicon chip , 2012, Nature Communications.

[16]  Keren Bergman,et al.  Optical interconnection networks for high-performance computing systems , 2012, Reports on progress in physics. Physical Society.

[17]  Kerry J. Vahala,et al.  Chemically etched ultrahigh-Q wedge-resonator on a silicon chip , 2012, Nature Photonics.

[18]  W. Bogaerts,et al.  Compact Single-Mode Silicon Hybrid Rib/Strip Waveguide With Adiabatic Bends , 2011, IEEE Photonics Journal.

[19]  Anthony L Lentine,et al.  Vertical junction silicon microdisk modulators and switches. , 2011, Optics express.

[20]  Michael R. Watts,et al.  Optical resonators: Microphotonic thermal imaging , 2007 .

[21]  Qianfan Xu,et al.  Micrometre-scale silicon electro-optic modulator , 2005, Nature.

[22]  Michael J. Shaw,et al.  Fabrication techniques for low-loss silicon nitride waveguides , 2005, SPIE MOEMS-MEMS.

[23]  N. Feng,et al.  Low loss shallow-ridge silicon waveguides. , 2010, Optics express.