论文信息 - Potassium hydroxide surface modification for low temperature Cu/SiO2 hybrid bonding - 字舞流文

Potassium hydroxide surface modification for low temperature Cu/SiO2 hybrid bonding

Hsiang-Hung Chang | Dinh-Phuc Tran | Chin-Hung Wang | O. Lee | W. Chiu | J. Ong | Chia-Wen Chiang | Wenshuo Wu | Chih-Huang Chen | Fang Shen | Min Yu | Shih-Chi Yang