Scheduling algorithm of dual-armed cluster tools with residency time and reentrant constraints

To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints, a heuristic scheduling algorithm was developed. Firstly, on the basis of formulating scheduling problems domain of dual-armed cluster tools, a non-integer programming model was set up with a minimizing objective function of the makespan. Combining characteristics of residency time and reentrant constraints, a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools. Finally, the experiments were designed to evaluate the proposed algorithm. The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.

[1]  Chihyun Jung,et al.  An Efficient Mixed Integer Programming Model Based on Timed Petri Nets for Diverse Complex Cluster Tool Scheduling Problems , 2012, IEEE Transactions on Semiconductor Manufacturing.

[2]  W.M. Zuberek,et al.  Cluster tools with chamber revisiting-modeling and analysis using timed Petri nets , 2004, IEEE Transactions on Semiconductor Manufacturing.

[3]  R. S. Gyurcsik,et al.  Single-wafer cluster tool performance: an analysis of throughput , 1994 .

[4]  MengChu Zhou,et al.  Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant Atomic Layer Deposition Processes , 2011, IEEE Transactions on Automation Science and Engineering.

[5]  Chihyun Jung,et al.  Cyclic scheduling of cluster tools with non-identical chamber access times , 2011, Proceedings of the 2011 Winter Simulation Conference (WSC).

[6]  Tae-Eog Lee,et al.  Scheduling analysis of time-constrained dual-armed cluster tools , 2003 .

[7]  MengChu Zhou,et al.  Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets , 2012, IEEE Transactions on Automation Science and Engineering.

[8]  S. Venkatesh,et al.  A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots , 1997 .

[9]  MengChu Zhou,et al.  Schedulability Analysis and Optimal Scheduling of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation , 2012, IEEE Transactions on Automation Science and Engineering.

[10]  Wu Bin,et al.  Modeling of photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets , 2007 .

[11]  Jae Chun Hyun,et al.  Transient solutions of dynamics in fiber spinning and film casting accompanied by flow-induced crystallization , 2007 .

[12]  Feng Chu,et al.  A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints , 2008, IEEE Transactions on Semiconductor Manufacturing.

[13]  MengChu Zhou,et al.  Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation , 2012, IEEE Transactions on Automation Science and Engineering.

[14]  H. Neil Geismar,et al.  Throughput optimization in dual-gripper interval robotic cells , 2009 .

[15]  S. Rostami,et al.  An optimal residency-aware scheduling technique for cluster tools with buffer module , 2004, IEEE Transactions on Semiconductor Manufacturing.

[16]  Xin Li,et al.  Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints , 2012 .

[17]  Tae-Eog Lee,et al.  Scheduling single-armed cluster tools with reentrant wafer flows , 2006 .

[18]  Tae-Eog Lee,et al.  Modeling and implementing a real-time scheduler for dual-armed cluster tools , 2001, Comput. Ind..

[19]  Ieee Staff,et al.  Proceedings of the 2011 Winter Simulation Conference , 2011 .