Application of Multivariate Statistical Analysis to STEM X-ray Spectral Images: Interfacial Analysis in Microelectronics

Multivariate statistical analysis methods have been applied to scanning transmission electron microscopy (STEM) energy-dispersive X-ray spectral images. The particular application of the multivariate curve resolution (MCR) technique provides a high spectral contrast view of the raw spectral image. The power of this approach is demonstrated with a microelectronics failure analysis. Specifically, an unexpected component describing a chemical contaminant was found, as well as a component consistent with a foil thickness change associated with the focused ion beam specimen preparation process. The MCR solution is compared with a conventional analysis of the same spectral image data set.

[1]  Bridget S Wilson,et al.  Markers for detergent-resistant lipid rafts occupy distinct and dynamic domains in native membranes. , 2004, Molecular biology of the cell.

[2]  Michael R. Keenan,et al.  Automated analysis of large (>4Gb) spectral images with efficient out-of-core- RAM algorithms , 2003, Microscopy and Microanalysis.

[3]  J. Titchmarsh.  EDX spectrum modelling and multivariate analysis of sub-nanometer segregation , 1999 .

[4]  P. Kotula,et al.  Membrane Receptor Mapping: The Membrane Topography of FcεRI Signaling , 2004 .

[5]  P. Kotula,et al.  Spectral Imaging Analysis of Interfacial Reactions and Microstructures in Brazing of Alumina by a Hf‐Ag‐Cu Alloy , 2004 .

[6]  P. Kotula,et al.  Automated Analysis of SEM X-Ray Spectral Images: A Powerful New Microanalysis Tool , 2003, Microscopy and Microanalysis.

[7]  Michael R. Keenan,et al.  Accounting for Poisson noise in the multivariate analysis of ToF‐SIMS spectrum images , 2004 .

[8]  P. Kotula,et al.  Fatigue of metallic microdevices and the role of fatigue-induced surface oxides , 2004 .

[9]  Steven M. George,et al.  Atomic-layer deposition of wear-resistant coatings for microelectromechanical devices , 2003 .

[10]  S. Dumbill,et al.  MULTIVARIATE STATISTICAL ANALYSIS OF FEG‐STEM EDX SPECTRA , 1996 .

[11]  P. Kotula,et al.  Multivariate Statistical Analysis of EEL-Spectral Images , 2004, Microscopy and Microanalysis.

[12]  P. Kotula,et al.  Oxide dispersion strengthening of nickel electrodeposits for microsystem applications , 2004 .

[13]  J. Friel,et al.  Position-tagged spectrometry: a new approach for EDS spectrum imaging , 1995 .

[14]  P. Kotula,et al.  X-ray spectral imaging in the STEM for microelectronics failure analysis , 2003, Microscopy and Microanalysis.