Components for Microfluidic Handling Modules

Microanalysis systems which are built up in a modular way can be adapted to various applications by exchanging individual modules. Thus, a bigger number of units can be sold and prices reduced. At the Karlsruhe Nuclear Research Center a microfluidic handling module is being developed which will be used in two different microanalysis systems joined with sensor modules. A batch fabrication process has been developed which was used to manufacture micropumps and microvalve systems by assembly of two molded thermoplastic parts and transfer of a polyimide diaphragm from a silicon wafer.