(100)- and (110)-oriented nMOSFETs with highly scaled EOT in La-silicate/Si interface for multi-gate architecture
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Hiroshi Iwai | Nobuyuki Sugii | Kuniyuki Kakushima | Parhat Ahmet | Yoshinori Kataoka | Akira Nishiyama | Kazuo Tsutsui | Kenji Natori | Takeo Hattori | Takamasa Kawanago
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