ESTIMATION OF UNCERTAINTY FROM UNKNOWN SYSTEMATIC ERRORS IN COORDINATE METROLOGY

In coordinate metrology, a feature (Gaussian associated feature) is calculated from a measured data set by CMM (Coordinate Measuring Machine) using least squares method. This data processing flow is called as "feature- based metrology". In the feature-based metrology, it is a key technique to estimate the uncertainty of measurement in the specific measuring strategy. In this paper, the effects of unknown systematic errors are theoretically analyzed to estimate the uncertainties. The estimation method of uncertainties from two types of unknown systematic errors, such as errors of calibration of ball probe and errors form deviations of measured workpieces, are proposed.