Simulating the Inuence of the Nozzle Diameter on the Shape of Micro Geometries generated with Jet Electrochemical Machining

Jet Electrochemical Machining (Jet-ECM) is an unconventional procedure for micromachining (1, 2, 3). Based on localized anodic dissolution three-dimensional geome- tries (4) and microstructured surfaces (5) can be manufactured using Jet-ECM. COMSOL Multiphysics is used at Chemnitz UT to sim- ulate the electric current density in the jet and the dissolution process (6). Using tran- sient pseudo 3-D models, the dissolution pro- cess of Jet-ECM point machining is simulated. A mesh displacement dependent on the nor- mal current density implements Faraday's law in the model to simulate the prole shape. In this study the inuence of the nozzle diameter is investigated. All simulation pa- rameters like electric potential, electric con- ductivity, specic dissolution volume and cur- rent eciency were taken from own experi- ments. The results demonstrate that the sim- ulated diameter of Jet-ECM point erosion is a linear function of the nozzle diameter. The function can perspectively be used for interpo- lation and extrapolation of the Jet-ECM ero- sion width. The comparison of simulated and measured point erosion proles demonstrate a good coincidence.