Hinged polysilicon structures with integrated CMOS TFTs

The surface micromachining process described can produce a variety of microelectromechanical components, including CMOS thin film transistors and three dimensional polysilicon structures with large features and high detail in all three dimensions. Polysilicon structural elements are made with integrated hinges, which allow three dimensional structures to be erected out of the plane of the wafer. CMOS transistors are integrated directly in the structural thin films, and flexible polysilicon elements electrically connect the structures to the substrate. Some batch assembly of the structural elements has been demonstrated, and a first generation CAD system has been developed to model the structural half of the process.<<ETX>>

[1]  Patrick J. French,et al.  Polycrystalline Silicon Strain Sensors , 1985 .

[2]  W. Hawkins,et al.  Polycrystalline-silicon device technology for large-area electronics , 1986, IEEE Transactions on Electron Devices.

[3]  Euisik Yoon,et al.  A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[4]  M. Parameswaran,et al.  CMOS electrothermal microactuators , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[5]  Miko Elwenspoek,et al.  In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators , 1990 .

[6]  Y. Zhang,et al.  Pressure sensor design and simulation using the CAEMENS-D , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[7]  Richard S. Payne,et al.  Surface Micromachined Accelerometer: A Technology Update , 1991 .

[8]  Jacob K. White,et al.  A computer-aided design system for microelectromechanical systems (MEMCAD) , 1992 .

[9]  I. Shimoyama,et al.  Creation of an insect-based microrobot with an external skeleton and elastic joints , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.