Semiconductor production equipment management system and a method of statistical process control

The present invention discloses a semiconductor manufacturing plant control system and its statistical process control method for increasing or maximizing reliability. His system, a plurality of unit process is carried out a variety of semiconductor device processing unit; A plurality of measuring devices for measuring the pattern characteristics of the wafer process is completed, each unit in the plurality of units of processing equipment; And by as comprising a host computer to detect the abnormalities of the unit process using a T-square (T Statistic, Q statistic, the skip (skip), the host (host), the computer