In-run scale factor and drift calibration of MEMS gyroscopes with rejection of acceleration sensitivities

We report a ~50PPM precision in-run calibration platform for MEMS gyroscopes. In this work we demonstrate an integrated system capable of extracting instantaneous scale factor, drifts and cross axis sensitivities of the commercial ADXRS646 Z-axis gyroscope, with complete in-run rejection of acceleration sensitivities. The demonstrated method is applicable to any MEMS Coriolis force gyroscopes. The 50ppm calibration result is limited by the inherent limit of the gyroscope, with the calibration system being potentially able to extract even higher levels of accuracy.

[1]  F. Ayazi,et al.  Electrostatic self-calibration of vibratory gyroscopes , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[2]  K. Najafi,et al.  Fused-Silica Micro Birdbath Resonator Gyroscope ( $\mu$-BRG) , 2014, Journal of Microelectromechanical Systems.

[3]  Khalil Najafi,et al.  A Microactuation and Sensing Platform With Active Lockdown for In Situ Calibration of Scale Factor Drifts in Dual-Axis Gyroscopes , 2015, IEEE/ASME Transactions on Mechatronics.

[4]  Amit Lal,et al.  Multi-modal mechanical stimuli stage for in-situ calibration of MEMS gyroscopes , 2015, 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings.