Surface Acoustic Wave를 이용한 무선 압력 센서 설계 및 구현

Surface Acoustic Wave (SAW) devices can be used for wireless sensor elements, called SAW transponders, for measuring physical quantities such as pressure that do not need any power supply and may be accessed wirelessly. SAW devices were fabricated on 128° Y-X LiNbO₃ piezoelectric substrate. The signal response of SAW sensor on the pressure change were compared. To measure the change of SAW velocity. Pressure changed form 15 psi to 40 psi was linearly changed, the SAW sensor is application to the pressure sensor.