论文信息 - Direct Formation of C54 Phase on the Basis of C40 TiSi 2 and Its Applications in Deep Sub-Micron Technology - 字舞流文

Direct Formation of C54 Phase on the Basis of C40 TiSi 2 and Its Applications in Deep Sub-Micron Technology

S. Y. Chen | W. S. Li | A. See | Zexiang Shen | S. Xu | L. Chan

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