论文信息 - Modeling of Diffusion and Incorporation of Interstitial Oxygen Ions at the TiN/SiO2 Interface. - 字舞流文

Modeling of Diffusion and Incorporation of Interstitial Oxygen Ions at the TiN/SiO2 Interface.

A. Shluger | A. Bochkarev | E. Olsson | K. Patel | M. Bosman | M. N. Popov | J. Spitaler | J. Cottom | M. Munde | M. Popov