论文信息 - Low-cost silicon sensors for mass flow measurement of liquids and gases

Low-cost silicon sensors for mass flow measurement of liquids and gases

Abstract A low-cost silicon sensor for measuring the mass flow rate of gases and liquids has been developed. Its operation is based on heat transfer from heated resistors to a flowing fluid (electrocaloric principle). The difference between the temperature of the sensors on the chip, the heating power, and the heater temperature can be used to measure the mass flow. It is important to realize that sensors are produced in silicon through the usage of micro-technology. Nitrogen and water are used for testing the sensor. The sensor has a high dynamic response and is suitable for dynamic fluid measurements. The possible measuring flow rates range from 0 to 500 ml/min for gases and 0 to 500 or 0 to 10 ml/min for liquids.

Nam-Trung Nguyen | R. Kiehnscherf

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