A digital signal processing-based control system for a micro-electromechanical systems vibrating gyroscope with parametric amplification and force rebalance control

This article reports a digital signal processing-based digital implementation of a micro-ring gyroscope control system that can be programmed to operate in open loop with parametric amplification or closed loop with force rebalance control according to bandwidth and dynamic range requirements. Parametric amplification is directly applied to the secondary mode and amplifies the Coriolis response by an order of magnitude. In order to improve the dynamic range and bandwidth performance of the gyroscope, force rebalance control loops are designed for the vibrations both in-phase and in quadrature with the Coriolis response. Experimental results show parametric amplification of the Coriolis response by a factor of 11 and correspond to an improvement in the signal-to-noise ratio by a factor of 9.5. The effectiveness of the force rebalance control is shown experimentally, and both the measurement bandwidth and the dynamic range have increased beyond the test capability of the rate table.

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