论文信息 - Study of Isotropic and Si-Selective Quasi Atomic Layer Etching of Si1−xGex - 字舞流文

Study of Isotropic and Si-Selective Quasi Atomic Layer Etching of Si1−xGex

Guilei Wang | Huilong Zhu | H. Radamson | Junjie Li | Yongkui Zhang | Weixing Huang | K. Jia | Xiaogen Yin | Chen Li | Liheng Zhao