Nonlinear Feedback Control of a Coupled Kinetic Monte Carlo-Finite Difference Code

Abstract Product quality variables for many electronics and materials processes are set at the nanoscale and smaller length scales. Although the control of these processes is of scientific and industrial interest, there is a shortage of feedback controller design methods based on the noncontinuum models that describe such nanoscopic phenomena. In this study, linear, gain-scheduled, and nonlinear feedback controllers are designed for a coupled kinetic Monte Carlo-finite difference code that simulates the manufacture of copper interconnects. The feedback controller designs incorporate a low order stochastic model constructed from the coupled continuum-noncontinuum code

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