论文信息 - 7F-3 Fabrication of High Stability Oscillators Using AlN/Si High Overtone Bulk Acoustic Resonators - 字舞流文

7F-3 Fabrication of High Stability Oscillators Using AlN/Si High Overtone Bulk Acoustic Resonators

A. Artieda | P. Muralt | B. Belgacem | L. Chommeloux | R. Boudot | G. Martin | Y. Gruson | S. Ballandras | J. Masson