Transimpedance amplifier with programmable gain and bandwidth for capacitive MEMS accelerometers

In this work, a capacitance-to-voltage converter based on a fully-differential transimpedance amplifier (TIA) with programmable gain and bandwidth for MEMS accelerometers is presented. It is aimed for a differential surface-micromachined comb-finger capacitive accelerometer, but can be used in many other capacitive sensor applications. The TIA has been designed in a 180-nm CMOS technology and it achieves a minimum equivalent input noise of 42 fA/√Hz at 50 kHz, which corresponds to an acceleration noise of 100 μg/√Hz.

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