Thermoelastic damping in micro-scale circular plate resonators

The governing equations of coupled thermoelastic problems are established for out-of-plane vibration of a circular plate. The analytical expression for thermoelastic damping is obtained. Then the thermoelastic damping is studied under different environmental temperature, plate dimensions and boundary conditions.

[1]  G. Bao,et al.  A heat transfer analysis for quartz microresonator IR sensors , 1998 .

[2]  Ali H. Nayfeh,et al.  Modeling and simulations of thermoelastic damping in microplates , 2004 .

[3]  Michael L. Roukes,et al.  Energy dissipation in suspended micromechanical resonators at low temperatures , 2000 .

[4]  C. Zener.  INTERNAL FRICTION IN SOLIDS. I. THEORY OF INTERNAL FRICTION IN REEDS , 1937 .

[5]  Stewart McWilliam,et al.  Thermoelastic damping of the in-plane vibration of thin silicon rings , 2006 .

[6]  S. Galliou,et al.  Analysis of the infrared sensitivity of a quartz resonator application as a thermal sensor , 1994, 1994 Proceedings of IEEE Ultrasonics Symposium.

[7]  J. K. Gimzewski,et al.  Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device , 1994, Nature.

[8]  J. Butler,et al.  Loss due to transverse thermoelastic currents in microscale resonators , 2004 .

[9]  H. Ziegler,et al.  Digital sensor for IR radiation , 1983 .

[10]  T. Roszhart.  The effect of thermoelastic internal friction on the Q of micromachined silicon resonators , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[11]  N. C. MacDonald,et al.  Dissipation measurements of vacuum-operated single-crystal silicon microresonators , 1995 .

[12]  John R. Vig,et al.  Uncooled IR imaging array based on quartz microresonators , 1996 .

[13]  V. T. Srikar,et al.  Thermoelastic damping in fine-grained polysilicon flexural beam resonators , 2002 .

[14]  Yuxin Sun,et al.  Thermoelastic damping of the axisymmetric vibration of circular plate resonators , 2009 .

[15]  Narayana R Aluru,et al.  Theory of thermoelastic damping in electrostatically actuated microstructures , 2006 .

[16]  S. Prabhakar,et al.  Theory of Thermoelastic Damping in Micromechanical Resonators With Two-Dimensional Heat Conduction , 2008, Journal of Microelectromechanical Systems.

[17]  M. Roukes,et al.  Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals , 1996 .

[18]  B. S. Berry.  Precise Investigation of the Theory of Damping by Transverse Thermal Currents , 1955 .

[19]  A. Nayfeh,et al.  Natural frequencies of heated annular and circular plates , 2004 .

[20]  D. Fang,et al.  Thermoelastic damping in micro-beam resonators , 2006 .

[21]  Peter Vettiger,et al.  Temperature dependence of the force sensitivity of silicon cantilevers , 2004 .

[22]  Parpia,et al.  Low temperature mechanical properties of boron-doped silicon. , 1992, Physical review letters.

[23]  Qing Jiang,et al.  Analysis of the Air-damping Effect on a Micromachined Beam Resonator , 2003 .

[24]  J. David Zook,et al.  Optically excited self-resonant microbeams , 1996 .

[25]  M. Roukes,et al.  Thermoelastic damping in micro- and nanomechanical systems , 1999, cond-mat/9909271.

[26]  C. Zener.  INTERNAL FRICTION IN SOLIDS II. GENERAL THEORY OF THERMOELASTIC INTERNAL FRICTION , 1938 .