论文信息 - Molecular electronic transducer based planetary seismometer with new fabrication process

Molecular electronic transducer based planetary seismometer with new fabrication process

This paper describes a novel design and implementation of a short period seismometer based on molecular electronic transducer (MET) for the purpose of planetary exploration. A silicon on insulator (SOI)-based micro-fabrication is employed to reduce the hydraulic impedance of microfluidic channels in a MET device, resulting in improved noise floor and sensitivity. The resolution reached 1.78×10-7 (m/s2)/√Hz at 1.2 Hz with the sensitivity of 2500V/(m/s2).

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